A tool portfolio planning methodology for semiconductor wafer fabs

You, R.-C.R.-C.YouWeng, C.-R.C.-R.WengChou, Y.-C.Y.-C.ChouWu, H.H.H.H.WuLu, L.-C.L.-C.LuYON-CHUN CHOU2020-03-022020-03-021999https://scholars.lib.ntu.edu.tw/handle/123456789/467341A tool portfolio planning methodology for semiconductor wafer fabsconference paper10.1109/ISSM.1999.8087262-s2.0-0033355827https://www.scopus.com/inward/record.uri?eid=2-s2.0-0033355827&doi=10.1109%2fISSM.1999.808726&partnerID=40&md5=7aa8c3b4c981f77397f225c01f1bb239