Hsin-Chia HoBo-Kai ChaoHsin-Hung ChengLi-Wei NienMiin-Jang ChenTadaaki NagaoJIA-HAN LIChun-Hway Hsueh*2022-01-032022-01-032015978-4-86348-541-9https://www.scopus.com/inward/record.uri?eid=2-s2.0-85077214380&partnerID=40&md5=fa9828dc9953f5f6ca6ca2e99083c690https://www.osapublishing.org/abstract.cfm?uri=jsap-2015-13p_2C_11&origin=searchhttps://scholars.lib.ntu.edu.tw/handle/123456789/590855SERS has attracted much attention due to its great potential in analytical science and technology. For SERS substrates, ion beam [1] or electron beam lithography [2] have been widely used for fabricating periodic nanostructures which can bring very strong electromagnetic field enhancements. However, the slow processing efficiency and high-cost of these techniques limit the mass production. In this study, the process with low cost and easy fabrication of random nanostructures was evaluated to obtain high roughness and low reflectance textured surfaces via wet etching and island lithography. In particular, the reflectance and Raman spectrum for micro-pyramid and nanopillar structures were discussed. The reflectances of different structures were simulated using finite-difference time-domain (FDTD) method and the results were compared with the experimental measurements. © 2015 Japan Society of Applied Physics, Optical Society of America.Antireflection; Surface enhanced Raman spectroscopy; Raman spectroscopyconference paper2-s2.0-85077214380