Liao, C.-D.C.-D.LiaoChao, K.-H.K.-H.ChaoTsai, J.-C.J.-C.TsaiJUI-CHE TSAI2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-71749095608&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350110Concentration measurement for sub-μliter solution using a cantilever sensor with an on-tip integrated micro spherical reflecting mirrorconference paper10.1109/OMEMS.2009.5338624