Molecular beam epitaxy, atomic layer deposition, and multiple functions connected via ultra-high vacuum

Lin, K.Y.K.Y.LinWan, H.W.H.W.WanChen, K.H.M.K.H.M.ChenFanchiang, Y.T.Y.T.FanchiangChen, W.S.W.S.ChenLin, Y.H.Y.H.LinCheng, Y.T.Y.T.ChengChen, C.C.C.C.ChenLin, H.Y.H.Y.LinYoung, L.B.L.B.YoungCheng, C.P.C.P.ChengPi, T.W.T.W.PiKwo, J.J.KwoMINGHWEI HONG2019-12-272019-12-272019https://scholars.lib.ntu.edu.tw/handle/123456789/443293Molecular beam epitaxy, atomic layer deposition, and multiple functions connected via ultra-high vacuumjournal article10.1016/j.jcrysgro.2019.02.0352-s2.0-85061788213https://www.scopus.com/inward/record.uri?eid=2-s2.0-85061788213&doi=10.1016%2fj.jcrysgro.2019.02.035&partnerID=40&md5=e9b9c5e7e289bc46308907d3f65e4ea9