Synthesis and characterization of fluorinated -ketoiminate and imino-alcoholate Pd complexes: precursors for palladium chemical vapor deposition

Liu, Yan-HsiuYan-HsiuLiuCheng, Yi-ChingYi-ChingChengTung, Yung-LiangYung-LiangTungChi, YunYunChiChen, Yao-LunYao-LunChenLiu, Chao-ShiuanChao-ShiuanLiuPeng, Shie-MingShie-MingPengLee, Gene-HsiangGene-HsiangLee2009-09-282018-07-102009-09-282018-07-102003http://ntur.lib.ntu.edu.tw//handle/246246/168127application/pdf282611 bytesapplication/pdfen-USSynthesis and characterization of fluorinated -ketoiminate and imino-alcoholate Pd complexes: precursors for palladium chemical vapor depositionjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/168127/1/336.pdf