Numerical Simulation of Air Flow in the Mini-environment and SMIF Enclosure

Huan-Ruei ShiuHsiao-Yi HuangSih-Li ChenMing-Tsun KeSIH-LI CHEN2021-10-072021-10-072003http://www.jmech.org.tw/https://scholars.lib.ntu.edu.tw/handle/123456789/584190Numerical Simulation of Air Flow in the Mini-environment and SMIF Enclosurejournal article