Advanced metal-gate/high-κ CMOS with small EOT and better high field mobility

CHIEH-HSIUNG KUANChin, A.A.ChinChen, W.B.W.B.ChenChen, P.C.P.C.ChenWu, Y.H.Y.H.WuChi, C.C.C.C.ChiLee, Y.J.Y.J.LeeChang-Liao, K.S.K.S.Chang-LiaoCHIEH-HSIUNG KUAN2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84874923240&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/372483Advanced metal-gate/high-κ CMOS with small EOT and better high field mobilityconference paper10.1109/ICSICT.2012.6467936