Chen H.-CFu L.-C.LI-CHEN FU2021-09-022021-09-0220191062922Xhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-85076795303&doi=10.1109%2fSMC.2019.8914599&partnerID=40&md5=af57d097a06944648369f18ea76685e4https://scholars.lib.ntu.edu.tw/handle/123456789/581390Atomic force microscope (AFM) is capable of constructing accurate 3-D surface profile at a nanometer resolution. This paper demonstrates the amplitude-detection mode atomic force microscopy (AM-AFM) with long-range of the modified cycloid trajectory. For this purpose, the proposed system contains three axis scanner including the hybrid xy-scanning subsystem and the z-measuring subsystem. Besides, the internal model principle-based neural network complementary sliding mode control (IMP-based NNCSMC) approach of designing controller is implemented for the xy-piezoelectric scanner to overcome some uncertainties, i.e. hysteresis and cross-coupling effect. On the other hand, the neural network complementary sliding mode control (NNCSMC) scheme is employed on controller design along the z-piezoelectric scanner to precisely trace the topography change based on amplitude feedback signals. Due to incorporating the piezoelectric leg-based long traveling range nano-positioning stage (LTRPS) in xy-plane, an accurate AFM imaging can be obtained with the modified cycloid trajectory for long-range scanning. ? 2019 IEEE.Controllers; Nanotechnology; Piezoelectricity; Scanning; Sliding mode control; Topography; Trajectories; Amplitude detection; Controller designs; Cross-couplings; Internal model principle; Nano-positioning stages; Nanometer resolutions; Piezoelectric scanner; Surface profiles; Atomic force microscopyconference paper10.1109/SMC.2019.89145992-s2.0-85076795303