Fabrication of low-loss silicon photonic wires by self-profile transformation and applications in 3-D photonic integration and nonlinear optics

Lee, M.-C.M.M.-C.M.LeeChiu, W.-C.W.-C.ChiuYang, T.-M.T.-M.YangChen, C.-H.C.-H.ChenLu, C.-Y.C.-Y.LuGONG-RU LIN2020-06-112020-06-112010https://scholars.lib.ntu.edu.tw/handle/123456789/500166Fabrication of low-loss silicon photonic wires by self-profile transformation and applications in 3-D photonic integration and nonlinear opticsjournal article10.1109/JQE.2010.20473282-s2.0-77953688609https://www.scopus.com/inward/record.uri?eid=2-s2.0-77953688609&doi=10.1109%2fJQE.2010.2047328&partnerID=40&md5=0f0efae51775d7a5b83dbe4f8992c8fa