High purity nano-crystalline carbon nitride films prepared at ambient temperature by ion beam sputtering

Lu, T.R.T.R.LuKuo, C.T.C.T.KuoYang, J.R.J.R.YangChen, L.C.L.C.ChenChen, K.H.K.H.ChenJER-REN YANGLI-CHYONG CHEN2020-05-122020-05-121999https://scholars.lib.ntu.edu.tw/handle/123456789/491673High purity nano-crystalline carbon nitride films prepared at ambient temperature by ion beam sputteringjournal article10.1016/S0257-8972(99)00154-12-s2.0-0032681744https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032681744&doi=10.1016%2fS0257-8972%2899%2900154-1&partnerID=40&md5=88c18d457521eeeae99597ade196835d