M.-A. Gr?tillatY.-J. YangE. S. HungV. RabinovichG. K. AnanthasureshN. F. de RooijS. D. SenturiaYAO-JOE YANG2021-11-252021-11-251997https://scholars.lib.ntu.edu.tw/handle/123456789/587801https://www.scopus.com/inward/record.uri?eid=2-s2.0-0030655325&partnerID=40&md5=43fbcb575d14571bf9ed4d5c5718d01cChicagoNonlinear electromechanical behavior of an electrostatic microrelayconference paper2-s2.0-0030655325