Kuo H.-YCheng W.-RWu T.-HSheen H.-JWang C.-CLu C.-J.HORN-JIUNN SHEEN2021-08-052021-08-05202122279040https://www.scopus.com/inward/record.uri?eid=2-s2.0-85106632440&doi=10.3390%2fchemosensors9050104&partnerID=40&md5=b87670c89878e8db8339d13c90589938https://scholars.lib.ntu.edu.tw/handle/123456789/577065This paper presents the synthesis and evaluation of a carbon molecular sieve membrane (CMSM) grown inside a MEMS-fabricated μ-preconcentrator for sampling highly volatile organic compounds. An array of ?-pillars measuring 100 ?m in diameter and 250 ?m in height were fabricated inside a microfluidic channel to increase the attaching surface for the CMSM. The surface area of the CMSM was measured as high as 899 m2/g. A GC peak amplification factor >2 × 104 was demonstrated with gaseous ethyl acetate. Up to 1.4 L of gaseous ethanol at the 100 ppb level could be concentrated without exceeding the capacity of this microchip device. Sharp desorption chromatographic peaks (<3.5 s) were obtained while using this device directly as a GC injector. Less volatile compounds such as gaseous toluene, m-xylene, and mesitylene appeared to be adsorbed strongly on CMSM, showing a memory effect. Sampling parameters such as sample volatilities, sampling capacities, and compound residual issues were empirically determined and discussed. ? 2021 by the authors. Licensee MDPI, Basel, Switzerland.[SDGs]SDG3journal article10.3390/chemosensors90501042-s2.0-85106632440