The low-temperature a-Si N <inf>x</inf> films with high impermeability and high optical gap with application to organic light-emitting diode

Chang, H.-Y.H.-Y.ChangMeng, C.-Y.C.-Y.MengHuang, C.-W.C.-W.HuangSI-CHEN LEE2020-06-112020-06-112005https://scholars.lib.ntu.edu.tw/handle/123456789/498763[SDGs]SDG7The low-temperature a-Si N <inf>x</inf> films with high impermeability and high optical gap with application to organic light-emitting diodejournal article10.1063/1.20891612-s2.0-27744432430https://www.scopus.com/inward/record.uri?eid=2-s2.0-27744432430&doi=10.1063%2f1.2089161&partnerID=40&md5=0f49fe4a026c72ffe307c1a66d44f356