T. N. ArunagiriY. ZhangO. ChyanM. El-BounaniM. J. KimC. T. WuL. C. ChenK. H. Chen2020-06-202020-06-20200500036951https://scholars.lib.ntu.edu.tw/handle/123456789/5039755nm ruthenium thin film as a directly plateable copper diffusion barrierjournal articlehttps://doi.org/10.1063/1.1867560