Ultrathin TiO2 amorphous films for high transmittance APSM blanks at 157 and 193 nm wavelength simultaneously

Lai, F. D.F. D.LaiChang, C. M.C. M.ChangWang, L. A.L. A.WangYih, T. S.T. S.Yih2009-03-252018-07-062009-03-252018-07-062003http://ntur.lib.ntu.edu.tw//handle/246246/148205application/pdf121997 bytesapplication/pdfen-USUltrathin TiO2 amorphous films for high transmittance APSM blanks at 157 and 193 nm wavelength simultaneouslyjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/148205/1/50.pdf