MEMS based thin film pressure/temperature sensor for on-line monitoring injection molding

REN-CHYUAN LUOO Chen2018-09-102018-09-101998-01http://scholars.lib.ntu.edu.tw/handle/123456789/342815[SDGs]SDG7MEMS based thin film pressure/temperature sensor for on-line monitoring injection moldingconference paper10.1109/iecon.1998.7228382-s2.0-0032311542