A New Process for Liquid Phase Deposition of Silicon Oxide and Its Application in Amorphous Silicon Thin Film Transistor

Chou, J. S.J. S.Chou李嗣涔Lee, Si-ChenSi-ChenLee2009-02-042018-07-062009-02-042018-07-061994http://ntur.lib.ntu.edu.tw//handle/246246/121116Hsinchuen-USA New Process for Liquid Phase Deposition of Silicon Oxide and Its Application in Amorphous Silicon Thin Film Transistorconference paper