Dept. of Mech. Eng., National Taiwan Univ.Yang, Yao-JoeYao-JoeYangKamon, MattanMattanKamonRabinovich, V.L.V.L.RabinovichGhaddar, ChahidChahidGhaddarDeshpande, ManishManishDeshpandeGreiner, KenKenGreinerGilbert, J.R.J.R.Gilbert2007-04-192018-06-282007-04-192018-06-282001-01http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021270application/pdf473295 bytesapplication/pdfen-USModeling gas damping and spring phenomena in MEMS with frequency dependent macro-modelsjournal article10.1109/MEMSYS.2001.906554http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021270/1/00906554.pdf