2017-07-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/681979摘要：隨著科技工業&#63847;斷的進展以及人們生活形式的改變，環境汙染、食安問題層出&#63847;窮，而光譜儀用於偵測汙染物以及生物檢測，現今主流主要是單光儀或FTIR其體積龐大，且需要額外的中紅外光偵測器，造價昂貴，如何發展隨身可攜之檢測裝置成為一大挑戰。因此本子計畫規劃開發研製新型光譜分析儀，結合矽基&#63756;微米技術，有效縮小偵測器之體積，發展製作微型光譜儀氣體偵測器，最終至晶片型光譜儀氣體偵測器，搭配其他子計畫之光源，以光學方式測定待測物之光譜，使偵測器輕便化能隨身攜帶且即時檢測，達到高解析度低成本之目的。本計畫之矽基晶片型光譜儀，預計同時開發新穎可撓式彎曲光柵、光學共振腔與新穎矽基蕭特基光偵測器，利用可撓式彎曲光柵技術發展微型光柵光譜儀，相較於傳統光柵光譜儀，具更低廉之生產成本，可做為晶片型光譜儀發展期間之先期產品，而晶片型光譜儀之開發由光學共振腔與新穎蕭特基光偵測器所組成，另外本計畫將利用此蕭特基光偵測器開發紅外光影像之應用，將運用創新的矽半導體製程製作，透過特殊&#63756;米結構，增強蕭特基光偵測器對於紅外光偵測靈敏度與波長偵測範圍，光學共振腔與新穎蕭特基光偵測器將結合台灣成熟領先的矽半導體完整技術，因此生產成本可以大幅降低，。新式分析儀結合上述元件，具有低成本、小尺寸、高解析度並且可快速量測待測物等優點，此一矽基晶片型光譜儀是結合台灣的研發和生產，以及針對未來朝向健康安全照護及隨身可攜的世界趨勢，開創嶄新的科技產品。<br> Abstract: As the technology progresses and human lifestyle changes, the problems of environmental pollution and food safety become a huge concern. Spectroscopy is a good way to detect those pollutants. However, the existing instruments such as monochrometers and FTIRs are bulky and costly. Also, the infrared detectors required in those instruments are expensive. They altogether make the miniature detecting devices that are portable very challenging. In this sense, this subproject aims to develop a novel spectrometer by using silicon-based technology, which can effectively reduce the device size to become miniature spectrometers and eventually further advances towards chip spectrometers. By applying different light sources from other subprojects, we hope to optically detect the spectrum of interested materials. This technology not only gives the convenience of lightweight and portability when they come in handy, but also achieves high resolution and low cost. Meanwhile, this “silicon-based spectrometer” project also plans to develop other devices such as novel bending grating, optical resonators and novel silicon-based Schottky detectors. Compared to traditional grating spectrometers, bending grating technology could help develop miniature grating spectrometers. This method is more cost-effective and can be treated as the prior-stage product of chip spectrometers at the developmental stage. The chip spectrometers are structured with optical resonators and novel silicon-based Schottky detectors. This project will also incorporate Shottky detectors with innovative silicon semiconductor processing to produce IR image sensors. Through special nanostructures, Shottky spectrometers can increase the sensitivity of IR detectors and the wavelength detection range. The optical resonators and Shottky detectors can be possibly manufactured through leading technology in the semiconductor industry of Taiwan. Therefore, the production cost will be greatly reduced. This new analyzing technology using the aforesaid devices not only has merits of cost-effectiveness, minimal size and high resolutions, but also helps speed up the measurement process. Such silicon-based miniature spectrometers will integrate R&D and production capability in Taiwan. It will be a brand new high-tech product well matching the global trend of health care and portability in the future.單光儀矽基&#63756微米技術微型光譜儀蕭特基光偵測器光柵光譜儀monochrometersilicon-based technologyminiature spectrometersilicon-based Schottky detectorgrating spectrometers