Robust control of a high-precision positioning stage using an integrated H∞ and QFT controller

Tsai M.-S.You S.-H.Jeng J.-T.2019-07-042019-07-0420111045389Xhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-79955864432&doi=10.1177%2f1045389X10390251&partnerID=40&md5=0835f4aa48abef8f5b5904fdd7a54345https://scholars.lib.ntu.edu.tw/handle/123456789/412692Robust control of a high-precision positioning stage using an integrated H∞ and QFT controllerconference paper10.1177/1045389X103902512-s2.0-79955864432