The effect of Zn/Sn ratio on the electrical performance of amorphous ZrZnSnO (ZZTO) thin film transistors by RF sputtering

Cheng, I-ChunI-ChunChengJIAN-ZHANG CHENChiu, I.-C.I.-C.ChiuCheng, I-ChunI-ChunChengJIAN-ZHANG CHEN2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84885738721&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/372510The effect of Zn/Sn ratio on the electrical performance of amorphous ZrZnSnO (ZZTO) thin film transistors by RF sputteringconference paper10.1149/05008.0185ecst2-s2.0-84885738721