Kuo, C.-L.C.-L.KuoLin, S.-C.S.-C.LinWu, W.-J.W.-J.WuWEN-JONG WU2020-01-172020-01-172016https://scholars.lib.ntu.edu.tw/handle/123456789/451970Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvestingjournal article10.1088/0964-1726/25/10/1050162-s2.0-84989966336https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989966336&doi=10.1088%2f0964-1726%2f25%2f10%2f105016&partnerID=40&md5=9098fcc6a9983c4a41e2bb1a7b67bee8