Real-time and multipoint monitoring the dissolution rate of photoresist film by using a novel plastic optical fiber bundle

Horng, J.S.J.S.HorngLin, G.-R.G.-R.LinChen, C.W.C.W.ChenGONG-RU LIN2018-09-102018-09-101999http://www.scopus.com/inward/record.url?eid=2-s2.0-0033070925&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350186Real-time and multipoint monitoring the dissolution rate of photoresist film by using a novel plastic optical fiber bundlejournal article