Analysis of breakdown characteristics in high-k dielectrics under electrostatic discharge impulse stress

Chen, C.-H.C.-H.ChenLiao, M.H.M.H.LiaoChiu, F.-C.F.-C.ChiuHwang, H.-L.H.-L.HwangMING-HAN LIAO2020-01-132020-01-132010https://scholars.lib.ntu.edu.tw/handle/123456789/447975Analysis of breakdown characteristics in high-k dielectrics under electrostatic discharge impulse stressjournal article10.1063/1.32909732-s2.0-76949092180https://www.scopus.com/inward/record.uri?eid=2-s2.0-76949092180&doi=10.1063%2f1.3290973&partnerID=40&md5=a2b6a9d142465fb23670d7b40e273fad