王安邦臺灣大學：應用力學研究所黃昶斌Huang, Chang-BinChang-BinHuang2007-11-292018-06-292007-11-292018-06-292006http://ntur.lib.ntu.edu.tw//handle/246246/62501本研究是利用壓克力為基材來製作無閥式微幫浦，而此幫浦是利 用壓電片上下振動作為流體的驅動來源，並利用設計的漸張管/漸縮 管原理來得到所需的流量。在本研究中對於漸張管/漸縮管的長度以 及開口角度不同的單一振動腔之微幫浦來作一比較。發現在相同開口 角度下，長度的長短所得到最大流量值是相同的，但是長度較短的微 幫浦其趨勢較為平緩，亦即在最大流量值附近敏感度較低，因此性能 較好。而在開口角度方面，則是比較4.6°與9.8°，發現開口角度在 9.8°時性能較好，亦即所得到的最大流量值較高。此外在本研究中也 針對串聯式雙微幫浦作流量的分析，發現固定兩個振動腔中的一個， 只驅動另外一個振動腔，都可以達到流量提升的效果；而且也比較同 相位與不同相位差對於流量的影響，發現在相位差為90°時所得到的 最大流量值最大且為單一振動腔微幫浦的三倍。This study is to fabricate a valveless micropump by using PMMA materials, and the micropump uses piezoelectric disk to drive the fulid, and it uses diffuser/nozzle principle to get the flow rate. In diffuser/nozzle design, the micropump compares different length and angle with the other one. It may be seen that on the same angle the maximum flow rates of the different length single micropumps are the same, but the trend of the shorter length is smoother and sensitivity is lower near the maximum flow rate. On the different angles of 4.6°and 9.8°, it could be seen that the performance and the maximum flow rate of 9.8° is better. In addition, in the study it also analyse flow rate of the dual micropump in series. It could be seen that fixing one chamber and driving the other one is promoting the flow rate. it also fabricate dual chamber micropump in series to compare the flow rate with single chamber micropump in phase and in anti-phase, and it could be seen that at the phase angle of 90°, a three-fold increase of flow rate is relative to that of a sinle chamber operation.摘要......................................................................................................... i ABSTRACT............................................................................................ ii 目錄......................................................................................................... iii 圖目錄......................................................................................................v 表目錄.....................................................................................................ix 符號說明.................................................................................................x 第一章 緒論 1-1 前言與研究動機.........................................................................1 1-2 文獻回顧.....................................................................................3 1-3 研究目的.....................................................................................6 第二章 無閥式微幫浦原理與設計 2-1 無閥式微幫浦之基本原理.........................................................7 2-2 無閥式微幫浦流量之理論分析.................................................9 2-3 Diffuser之設計理論....................................................................13 第三章 無閥式微幫浦之製作 3-1 流道之製作.................................................................................14 3-2 熱壓印機台.................................................................................16 3-3 壓電片的選取與黏合.................................................................17 第四章 實驗儀器之架設與參數之設計 4-1波形產生器與放大器...................................................................18 4-2 實驗儀器之架設.........................................................................19 4-3 微幫浦設計之幾何尺寸.............................................................21 第五章 實驗結果與討論 5-1 單一振動腔之微幫浦的比較(BC1)...........................................22 5-2 單一振動腔之微幫浦的比較(BC2)......................................... .25 5-3 串聯式雙振動腔之微幫浦的比較(BC1)...................................27 5-4 串聯式雙振動腔之微幫浦的比較(BC2)...................................29 第六章 結論與未來展望 6-1 結論.............................................................................................31 6-2 未來展望.....................................................................................33 參考文獻..................................................................................................341229631 bytesapplication/pdfen-US雙微型幫浦串聯Dual Micropumpseriesthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/62501/1/ntu-95-R91543021-1.pdf