Voltage linearity improvement of HfO<inf>2</inf>-based metal-insulator- metal capacitors with H<inf>2</inf> O prepulse treatment

CHEE-WEE LIULin, C.-M.C.-M.LinChen, Y.-T.Y.-T.ChenLee, C.-H.C.-H.LeeChang, H.-C.H.-C.ChangChang, W.-C.W.-C.ChangChang, H.-L.H.-L.ChangCHEE-WEE LIU2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-78650730754&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/365220Voltage linearity improvement of HfO<inf>2</inf>-based metal-insulator- metal capacitors with H<inf>2</inf> O prepulse treatmentjournal article10.1149/1.3517173