Chen, C.-Y.C.-Y.ChenLee, Y.-H.Y.-H.LeeChien, C.-J.C.-J.ChienYu, Y.-Y.Y.-Y.YuCHIH-KUNG LEE2020-04-282020-04-282012https://scholars.lib.ntu.edu.tw/handle/123456789/486167Generating high DOF light by using tapered hollow tube in a lithography systemconference paper10.1117/12.9067222-s2.0-84859597571https://www.scopus.com/inward/record.uri?eid=2-s2.0-84859597571&doi=10.1117%2f12.906722&partnerID=40&md5=3e22f544ce962677d32eed76a34e5237