New parametric point spread function calibration methodology for improving the accuracy of patterning prediction in electron-beam lithography

Chun-Hung LiuHoi-Tou NgKuen-Yu TsaiKUEN-YU TSAI2018-09-102018-09-102012-03http://scholars.lib.ntu.edu.tw/handle/123456789/374080New parametric point spread function calibration methodology for improving the accuracy of patterning prediction in electron-beam lithographyjournal article10.1117/1.JMM.11.1.013009WOS:000302781900021