Surface chemical states of heteroepitaxial nitride films on sapphire by metalorganic chemical vapor deposition

CHIH-CHUNG YANGLi, K.K.LiFeng, Z.C.Z.C.FengYang, C.-C.C.-C.YangLin, J.J.LinCHIH-CHUNG YANG2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-10644295597&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/307815Surface chemical states of heteroepitaxial nitride films on sapphire by metalorganic chemical vapor depositionjournal article