The fabrication of silicon-based PZT microstructures using an aerosol deposition method

Wang, Xuan-YuXuan-YuWangLee, Chi-YuanChi-YuanLeeHu, Yuh-ChungYuh-ChungHuShih, Wen-PinWen-PinShihLee, Chih-ChengChih-ChengLeeHuang, Jung-TangJung-TangHuangPEI-ZEN CHANG2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-42549133527&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/339307Article number 055034The fabrication of silicon-based PZT microstructures using an aerosol deposition methodjournal article10.1088/0960-1317/18/5/0550342-s2.0-42549133527WOS:000255659600034