Microstructures and dielectric properties of PZT thick films prepared by aerosol plasma deposition with microwave annealing

Huang, C.M.C.M.HuangWang, S.F.S.F.WangPeng, C.J.C.J.PengShieh, J.J.ShiehChang, C.S.C.S.ChangLin, T.S.T.S.Lin2008-12-312018-06-282008-12-312018-06-282006http://ntur.lib.ntu.edu.tw//handle/246246/95644application/pdf534561 bytesapplication/pdfen-USMicrostructures and dielectric properties of PZT thick films prepared by aerosol plasma deposition with microwave annealingjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/95644/1/02.pdf