Jywe W.-Y.Liu C.-H.Teng Y.-F.Chen C.-J.Shen J.-C.Hsieh W.-H.Wang Y.-C.Wen-Yuh Jywe2022-05-242022-05-242006https://www.scopus.com/inward/record.uri?eid=2-s2.0-33845752071&partnerID=40&md5=05682d96475289e7bcf7d1d2e8cfef52https://scholars.lib.ntu.edu.tw/handle/123456789/611976This paper presents a new precision multi-DOF measurement system which has been developed and implemented for the simultaneous measurement of 5DOF motion errors (two linear positions, as well as pitch, roll and yaw) of an X-Y stage. In this paper, the 3DOF laser interferometer was produced by designing the optical path from the one-degrees-of-freedom laser interferometer. The system employs two three-degree-of-freedom interferometers to detect two position errors and three angular errors of the X-Y stage. The experimental setups and measuring procedure and a systematic calculated method for the error verification are presented in the paper. The resolution of measuring the angular errors component is about 0.055 arcsec. Copyright ? 2006 by ASME.Angular errorsError verificationLaser interferometersMeasurement systemsDegrees of freedom (mechanics)Error detectionLaser applicationsMeasurement theoryInterferometersconference paper2-s2.0-33845752071