Determination of thickness and lattice distortion for the individual layer of strained AlGaN/GaN superlattice by high-angle annular dark-field scanning transmission electron microscopy

Shiojiri, M.M.ShiojiriCeh, M.M.CehSturm, S.S.SturmChuo, C.C.C.C.ChuoHsu, J. T.J. T.HsuYang, J. R.J. R.YangSajio, H.H.Sajio2008-12-242018-06-282008-12-242018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/93265application/pdf243341 bytesapplication/pdfen-USDetermination of thickness and lattice distortion for the individual layer of strained AlGaN/GaN superlattice by high-angle annular dark-field scanning transmission electron microscopyjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/93265/1/26.pdf