Fabrication of metrology test structures with programmed imperfection using helium ion beam direct write

Sheng-Wei ChienKuen-Yu Tsai*Jia-Han LiKUEN-YU TSAI2019-10-312019-10-312016https://scholars.lib.ntu.edu.tw/handle/123456789/429882Fabrication of metrology test structures with programmed imperfection using helium ion beam direct writeconference paper