A tool portfolio planning methodology for semiconductor wafer fabs

Inst. of Ind. Eng., National Taiwan Univ.Kao, Chung-EnChung-EnKaoYON-CHUN CHOU2007-04-192018-06-292007-04-192018-06-292000-06http://ntur.lib.ntu.edu.tw//handle/246246/2007041908551448application/pdf511273 bytesapplication/pdfen-USA tool portfolio planning methodology for semiconductor wafer fabsjournal article10.1109/SMTW.2000.883088http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041908551448/1/00883088.pdf