Ku, Kai-NingKai-NingKuChang, Po-ChihPo-ChihChangWang, Chung-ChihChung-ChihWangLin, Chen-YuChen-YuLinHsu, Chi-HsiangChi-HsiangHsuChen, Ting-HuiTing-HuiChenHuang, Chien-YingChien-YingHuangLee, Chi-SenChi-SenLeeChen, Yu-FangYu-FangChenChou, Kai-WeiKai-WeiChouChen, Shang-ChunShang-ChunChenLee, Ming-ChangMing-ChangLeeLin, Chien-ChungChien-ChungLinChu, Mu-TaoMu-TaoChuWu, Chih-IChih-IWu2021-09-022021-09-022020https://www.scopus.com/inward/record.uri?eid=2-s2.0-85098717909&doi=10.1109%2fOECC48412.2020.9273594&partnerID=40&md5=9d0c760d8d330561dcf74d3e814e2c54https://scholars.lib.ntu.edu.tw/handle/123456789/580706This research presents the design and characterization of the traveling wave Mach Zehnder modulator loaded L-shaped PN junction phase shifter at 72.8 Gbps data-rate. We propose a new structure of phase shifter with low series resistance meanwhile maintaining the FOM with low VπL (0.9 V-cm) and optical absorption. ? 2020 IEEE.Electric resistance; Light absorption; Light modulation; Phase shifters; Data rates; High Speed; L-shaped; Mach Zehnder modulator; P-n junction; Series resistances; Traveling wave; Traveling wave electrodes; Light modulatorsconference paper10.1109/OECC48412.2020.92735942-s2.0-85098717909