Innovative automatic resonant mode identification for nano-scale dynamic full-field characterization of MEMS using interferometric fringe analysis

Chen, L.-C.L.-C.ChenHuang, Y.-T.Y.-T.HuangLai, H.-W.H.-W.LaiChen, J.-L.J.-L.ChenChang, C.C.C.C.ChangLIANG-CHIA CHEN2020-01-132020-01-132008https://scholars.lib.ntu.edu.tw/handle/123456789/447883[SDGs]SDG9Innovative automatic resonant mode identification for nano-scale dynamic full-field characterization of MEMS using interferometric fringe analysisjournal article10.1088/0957-0233/19/12/1253032-s2.0-63749100869https://www.scopus.com/inward/record.uri?eid=2-s2.0-63749100869&doi=10.1088%2f0957-0233%2f19%2f12%2f125303&partnerID=40&md5=00d6dcf4eb44024c6cd76ac80a7bb5f1