Feedback Simulation and Correction of Duct Design for Acidity Exhaust System in a Semiconductor Factory

Chen, Wen-LiangWen-LiangChenLin, Mao-ChingMao-ChingLinHsieh, Jen-JieJen-JieHsiehChen, Sih-LiSih-LiChen2008-11-122018-06-282008-11-122018-06-282001http://ntur.lib.ntu.edu.tw//handle/246246/86518en-USFeedback Simulation and Correction of Duct Design for Acidity Exhaust System in a Semiconductor Factoryjournal article