Electronic and atomic structures of Si-C-N thin film by X-ray-absorption spectroscopy

YANG-FANG CHEN2018-09-102018-09-101998http://www.scopus.com/inward/record.url?eid=2-s2.0-0032073367&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/337770Electronic and atomic structures of Si-C-N thin film by X-ray-absorption spectroscopyjournal article2-s2.0-0032073367