Wang, L.A.L.A.WangChang, W.C.W.C.ChangChi, K.Y.K.Y.ChiLiu, S.K.S.K.LiuLee, C.D.C.D.LeeLON A. WANG2020-06-042020-06-042005https://scholars.lib.ntu.edu.tw/handle/123456789/497266Study on 193nm immersion interference lithographyconference paper10.1117/12.6007952-s2.0-21844434216https://www.scopus.com/inward/record.uri?eid=2-s2.0-21844434216&doi=10.1117%2f12.600795&partnerID=40&md5=01557cc3a1d3035984c1c1434d9f24a2