Design and Processing of Integrated Accelerometer Using Standard CMOS Process

Dai, C. L.C. L.DaiChang, P. Z.P. Z.ChangLu, S. S.S. S.Lu2009-05-152018-06-282009-05-152018-06-281997http://ntur.lib.ntu.edu.tw//handle/246246/156094en-USDesign and Processing of Integrated Accelerometer Using Standard CMOS Processjournal article