Small low-frequency noise IGZO TFTs using a bilayer HfO<inf>2</inf>/ SiO<inf>2</inf> dielectric and the applications of IGZO TFTs to biosensors

Su, L.-Y.L.-Y.SuLin, H.-Y.H.-Y.LinLin, H.-K.H.-K.LinJIAN-JANG HUANG2020-06-112020-06-112013https://scholars.lib.ntu.edu.tw/handle/123456789/499657[SDGs]SDG7Small low-frequency noise IGZO TFTs using a bilayer HfO<inf>2</inf>/ SiO<inf>2</inf> dielectric and the applications of IGZO TFTs to biosensorsconference paper10.1109/EDSSC.2013.66281772-s2.0-84890483969https://www.scopus.com/inward/record.uri?eid=2-s2.0-84890483969&doi=10.1109%2fEDSSC.2013.6628177&partnerID=40&md5=f22d014421870738e5bdc2a6f4aa804e