Development of innovative fringe locking strategies for vibration-resistant white light vertical scanning interferometry (VSI)

Chen, L.-C.L.-C.ChenTapilouw, A.M.A.M.TapilouwYeh, S.-L.S.-L.YehLin, S.-T.S.-T.LinChen, J.-L.J.-L.ChenHuang, H.-C.H.-C.HuangLIANG-CHIA CHEN2020-01-132020-01-132010https://scholars.lib.ntu.edu.tw/handle/123456789/447868Development of innovative fringe locking strategies for vibration-resistant white light vertical scanning interferometry (VSI)conference paper10.4028/www.scientific.net/KEM.437.892-s2.0-77955547404https://www.scopus.com/inward/record.uri?eid=2-s2.0-77955547404&doi=10.4028%2fwww.scientific.net%2fKEM.437.89&partnerID=40&md5=cd94d710b4d0785064c15c0af2200194