Morphology control of silicon nanotips fabricated by electron cyclotron resonance plasma etching

Hsu, C.H.C.H.HsuHuang, Y.F.Y.F.HuangChen, L.C.L.C.ChenChattopadhyay, S.S.ChattopadhyayChen, K.H.K.H.ChenLo, H.C.H.C.LoChen, C.F.C.F.Chen2020-06-182020-06-18200610711023https://scholars.lib.ntu.edu.tw/handle/123456789/503418Morphology control of silicon nanotips fabricated by electron cyclotron resonance plasma etchingjournal article10.1116/1.2163894