Crack-free micromachining on glass substrates by visible LIBWE using liquid metallic absorbers

Yen M.-HHuang C.-WHsu W.-CTai-Horng YoungZimmer KCheng J.-Y.2020-02-272020-02-2720100169-4332https://scholars.lib.ntu.edu.tw/handle/123456789/465415Crack-free micromachining on glass substrates by visible LIBWE using liquid metallic absorbersjournal article10.1016/j.apsusc.2010.06.0412-s2.0-77955516301