Efficient atomization using MHz MEMS-based ultrasonic nozzles

Tsai, S.C.S.C.TsaiSong, Y.L.Y.L.SongChou, Y.F.Y.F.ChouCheng, J.H.J.H.ChengTsai, C.S.C.S.TsaiJUNG-HO CHENG2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-30644464233&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/314921Efficient atomization using MHz MEMS-based ultrasonic nozzlesconference paper