Yang Y.-J.Kao P.-K.Hsu C.-C.2019-05-172019-05-17201510577157https://scholars.lib.ntu.edu.tw/handle/123456789/409117This letter presents a low-cost (<0.25 USD per device), easy-to-fabricated, and flexible microplasma generation device (MGD), and the use of this device to perform surface patterning. This dielectric-barrier-discharge-type MGD is made of double-side copper clad laminates and the electrode patterns were fabricated by a printed circuit board fabrication-based method, which allows the patterning without lithographic processes with good feature transfer fidelity. The MGD was utilized to create hydrophilic/hydrophobic contrast by a maskless patterning process, either creating hydrophobic patterns on hydrophilic surfaces or hydrophilic pattern on hydrophobic surfaces with sub-millimeter spatial resolution. In the former case, the hydrophobic fluorocarbon polymer (FCP) patterns were deposited on glass using c-C4F8 and He plasmas. In the latter case, hydrophilic patterns were created on a FCP-coated glass substrate using the MGD operated in ambient air. We also demonstrated that the flexibility of the device enabled non-flat surface patterning. ? 1992-2012 IEEE.Fluorocarbonmaskless patterningmicroplasmapolymerizationjournal article10.1109/JMEMS.2015.24572362-s2.0-84959546540https://www.scopus.com/inward/record.uri?eid=2-s2.0-84959546540&doi=10.1109%2fJMEMS.2015.2457236&partnerID=40&md5=b2d1267c5d932ac85ed5ad0cb47f9357