Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing

Rostami, H.H.RostamiBlue, J.J.BlueChen, A.A.ChenARGON CHENJAKEY BLUE2020-03-022020-03-022018https://scholars.lib.ntu.edu.tw/handle/123456789/467228Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturingconference paper10.1109/COASE.2018.85604352-s2.0-85059985370https://www.scopus.com/inward/record.uri?eid=2-s2.0-85059985370&doi=10.1109%2fCOASE.2018.8560435&partnerID=40&md5=d6dcbf800f4b54da8ba93077edcea273