Impact of integrating equipment health in production scheduling for semiconductor fabrication

Kao, Y.-T.Y.-T.KaoDauzère-Pérès, StéphaneStéphaneDauzère-PérèsJAKEY BLUESHI-CHUNG CHANG2020-03-022020-03-022018https://scholars.lib.ntu.edu.tw/handle/123456789/467299Impact of integrating equipment health in production scheduling for semiconductor fabricationjournal article10.1016/j.cie.2018.04.0532-s2.0-85047243274https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047243274&doi=10.1016%2fj.cie.2018.04.053&partnerID=40&md5=0622e84e5e542478fc35df453a59aada