A Temperature-Insensitive CMOS-MEMS Resonator Utilizing Electrical Stiffness Compensation

Liu, J.-R.J.-R.LiuLi, W.-C.W.-C.LiWEI-CHANG LI2021-02-042021-02-042019https://www.scopus.com/inward/record.url?eid=2-s2.0-85074350336&partnerID=40&md5=ea7e929adf360edd258e3e62d6ce4114https://scholars.lib.ntu.edu.tw/handle/123456789/546893[SDGs]SDG7[SDGs]SDG9A Temperature-Insensitive CMOS-MEMS Resonator Utilizing Electrical Stiffness Compensationconference paper10.1109/MEMSYS.2019.88708432-s2.0-85074350336